Course Websites

Fabrication, analysis, and properties of thin film materials. Principles and practice of (i) deposition of thin film materials by vacuum evaporation, sputtering and plasma assisted processes; (ii) modification of properties by thermal reaction, surface treatment, etc.; (iii) characterization of key properties including electrical conductivity, optical properties, and stress. Methods to optimize the film microstructure and engineering properties via growth techniques. Course Information: 3 undergraduate hours. 3 graduate hours. Prerequisite: ECE 340. Class Schedule Information: Register for the Lecture, one LAB and one LBD section.