Project

# Title Team Members TA Documents Sponsor
6 CONTACT PROBE ALIGNER FOR SEMICONDUCTOR MEASUREMENTS
 Stanford Zhou
Zehua Chen
Zihao Xie
 Rebecca Chen design_document0.pdf
final_paper0.pdf
presentation0.pptx
proposal0.docx
Team members:
Stanford Zhou (fzhou36)
Zehua Chen (zchen120)
Zihao Xie (zxie16)

Project title: CONTACT PROBE ALIGNER FOR SEMICONDUCTOR MEASUREMENTS

Problem statement:
In ECE 444 class, the measurement of semiconductor data using the probe station could cause damage to the device and the probes themselves, disabling others from getting measurements. This is primarily because some people isn’t that precise about the movements of the probes using their own hands， and can’t determine if the probe is already in contact with the wafer or not.
Solution:
We will implement a supplementary device to improve the functionality of the probe station. It helps control the knobs more accurately and avoids any destruction of the wafer. Our device will allow the user to control the probe knobs electronically instead of using hands. And our sensors can detect the distance between the probes and the wafer. It also can sense whether the probe should make contact or not based on the topology of the wafer underneath.
Scope of Project:
The device should be manageable to control one of the probe correctly. There are total of four probes but the others are simply duplications.
System Description:
The top-level design consists of three major blocks.
1. Circuit design and control system
 Long range (above 1cm) step motor forward operation circuit (state one)
 Short range (below 1cm) step motor forward operation circuit (state two)
 step motor backward operation circuit (state three)
 step motor hold operation circuit (state four)
 control system that switches the four states
 power supply (low voltage)
2. User interface
 USB port interfaces computer for manually control
 USB port interfaces computer for imagining and distance measurements from color sensor and IR distance sensor
3. Sensing units
 Color sensor: bright color indicates metal contact, dark indicates non-metal.
 IR distance sensor
Description of Functionality:
The probe will move faster if the distance between the probe and wafer is more than 1cm. It will move slower under 1cm. It does not allow further downward movements closer to the wafer only if it is above the correct region determined by color sensor. Once the probe touches the wafer, the voltage measurements will be available. The control system will put the motor in hold state. To minimize mechanical challenges , we will only use a toothed wheel attached to the motor and knob.

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