ECE Illinois skip navigation

G. Logan Liu

Xinhao Wang  Jimmy Jiang

TBA
3231 Micro and Nanotechnology Laboratory

• Course Syllabus (Fall 2012)
• Lecture Notes

         Lecture #1   Lecture #2    Lecture #3    Lecture #4   Lecture #5  Lecture #6  Lecture #7 Lecture #8 Lecture #9 Lecture #10  Lecture #11  Lecture #12  Exam 1 Review  Lecture #13  Lecture #14   Lecture #15   Lecture #16  Lecture #17  Lecture #18  Exam 2 Review

• Homework

       Homework #1   Homework #2   Homework #3  Homework #4   Homework #5   Homework #6   Homework #7  Homework #8  Homework #9

• Homework Solutions

       Solution #1     Solution #2     Solution #3    Solution #4    Solution #5   Solution #6  Exam #1 Solution  (Avarage: 79.4, SD: 8.43)  Solution #7    Solution #8    Solution #9

• Reading Assignments

     - Final Project Description; Exam 1 Example;  Exam 2 Formula Sheet;  Final Paper Example;  Piezo-Electricity Generation

     - Senturia Chapter 5; Senturia Chapter 6; Senturia Chapter 7

• Project Teams

1. Microfluidic Drug Release                     2. Anaphylaxis Drug Release                     

Daniel Gualandri (ME) - captain                Carlos Duarte - captain                                   

gualandri43@gmail.com                            carlosduarte88@gmail.com                             

John Seo (ME)                                          Umer Hassan                                                   

Shiul Khadka (EE)                                     Philip Magin                                                     

Ning Wang (EE)                                        Jessica Williams                                               

James Kim (EE)

 3.   Intradermal Drug Pump                     4. Inductive Heating Drug Delivery

Kaiyuan Wang - captain                              Youngjoon Koh - captain

wang212@illinois.edu                                  ykoh7@illinois.edu

Yukun Ren                                                   Eduardo Torrealba

Shengyuan Zhong                                        Sunggyu Chun

Feng Zhou                                                    Pakapreud Khumwan Pak

                                                                    Jiwon Park

5.   Electrostatic Drug Delivery Device

Wenyu Xu - captain

wenyuxu1@illinois.edu 

Ping-Ju Chen

Yiqian Wu

Guilherme Araujo

Wei Xiang Liau

This undergraduate/graduate course presents a comprehensive introduction to the principles, materials, fabrication techniques, and applications of microelectromechanical systems (MEMS). Students will gain an in-depth understanding of principles for micro sensors and actuators. Integrated microfabrication techniques that originated from microelectronics, microfabrication, and coupled with new micromechanical fabrication techniques will be discussed. A review of several transduction principles will be dicscussed. Case reviews will cover several important and interdisciplinary device classes including micro sensors, microfluid systems, and applications of MEMS in nanotechnology.