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ECE/ME/IE 485 - Introduction to Microelectromechanical Devices and Systems

Instructor:

G. Logan Liu

TA:

Xinhao Wang

Office Hour:

Prof. Logan Liu     4-5PM Tuesday        @ 3104 Micro and Nanotechnology Laboratory

TA                       1-3PM Wednesday   @ 3231 Micro and Nanotechnology Laboratory

ECE485 - Introduction to Microelectromechanical Devices and Systems:

         Lecture #1 ; Lecture #2 ; Lecture #3 ; Lecture #4 ; Lecture #5; Lecture #6 updated; Lecure #7.1  Lecture #7.2; Lecture #8; Lecture #9-10; Lecture #11-12; Lecture #13; Lecture #14; Lecture #15; Lecture #16 Resonator; Lecture #17; Lecture 19;

 

  • Homework

         HW #1 due 9/5; HW #2 due 9/19; HW #3 due 10/15; HW #4 due 10/17; HW #5 due 11/7; 

 

  • Homework Solutions

         HW #2 Solution; HW #3 Solution; HW #4 Solution; HW #5 Solution; HW #6 Solution; Exam #1 Solution

  • Reading Assignments

         Formula Sheet; Exam #1 Review; Final Project Description ; Example Paper #1; Example Paper #2; Photonic MEMS Guest Lecture

         Exam #2 Review; Formula Sheet; Tuning Fork Gyroscope Case Study

  • Project Teams

 

Description:

This undergraduate/graduate course presents a comprehensive introduction to the principles, materials, fabrication techniques, and applications of microelectromechanical systems (MEMS). Students will gain an in-depth understanding of principles for micro sensors and actuators. Integrated microfabrication techniques that originated from microelectronics, microfabrication, and coupled with new micromechanical fabrication techniques will be discussed. A review of several transduction principles will be dicscussed. Case reviews will cover several important and interdisciplinary device classes including micro sensors, microfluid systems, and applications of MEMS in nanotechnology.

Related Info:
Nanobionics Lab web site (http://nanobionics.ece.illinois.edu

 

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ECE 485 Course Homepage

 

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